%0 Book
%T Insulating films on semiconductors proceedings of the International Conference INFOS 83 Eindhoven, The Netherlands, 11 - 13 April, 1983
%A International Conference INFOS 1983 Eindhoven
%A Verweij, Jan F.
%A Verweij, J. F.
%I North-Holland
%@ 044486735X
%K Semiconductors. Insulating materials: Thin films
%K Konferenzschrift
%K Konferenzschrift 1983 Eindhoven
%K Isolierschicht
%K Halbleiter
%D 1983
%X Includes index
%C North-Holland
%C Amsterdam [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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