%0
Book
%T
Dielectric films for advanced microelectronics
%A Baklanov, Mikhail
%I Wiley
%@ 0470013605
%@ 9780470013601
%K Dielectric films
%K Microelectronics Materials
%K Dielektrische Schicht
%K Werkstoff
%K Mikroelektronik
%D 2007
%X Includes bibliographical references and index
%C Wiley
%C Chichester [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2