%0 Generic
%T MAM '97, abstracts booklet European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997
%A European Workshop: Materials for Advanced Metallization (1997 :Villard-de-Lans, France)
%A France Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle
%A International Union for Vacuum Science, Technique and Applications
%A IEEE Electron Devices Society
%I Société française du vide
%@ 0780339762
%@ 9780780339767
%K Integrated circuits Very large scale integration Design and construction Congresses
%K Semiconductor-metal boundaries Congresses
%K Metallizing Congresses
%K Konferenzschrift
%D 2010
%X "Supplément à la revue no 283"--Cover
%X "With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page
%X Includes bibliographical references and index
%X Use copy Restrictions unspecified star MiAaHDL
%C Société française du vide
%C Paris, France
%U https://katalog.slub-dresden.de/en/?cHash=d436d54d7a76fc6fe03d5b8c85ebf4cf&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=0-894514601&tx_find_find%5Btype%5D=endnote
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