%0
Generic
%T
Fully integrated transducer platform with cavity optomechanical readout
%A Michels, Thomas
%A Rangelow, Ivo W.
%A Gotszalk, Teodor Pawel
%A Moheimani, Reza
%I TU Ilmenau
%K Michels, Thomas 1892-1979
%K Mikrosystemtechnik
%D 2020
%C TU Ilmenau
%C Ilmenau
%U https://katalog.slub-dresden.de/en/?cHash=d436d54d7a76fc6fe03d5b8c85ebf4cf&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=13-1210861658&tx_find_find%5Btype%5D=endnote