%0 Generic
%T ˜Theœ Influence of High Temperature Steps on Defect Etching and Dislocations : Etch Pit Density Reduction in Multicrystalline Silicon
%A Fleck, Martin Gabriel
%I KOPS Universität Konstanz
%K Silicon
%K Dislocations
%K Etching
%K Temperature
%K Silicon, Dislocations, Crystal Defects, Defect Etching, Etch Pit Density, Gettering
%D 2020
%C KOPS Universität Konstanz
%C Konstanz
%U https://katalog.slub-dresden.de/en/?cHash=d436d54d7a76fc6fe03d5b8c85ebf4cf&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=13-1233203193&tx_find_find%5Btype%5D=endnote
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