%0 Generic
%T Thermoelectric transport properties of Si, SiGe, and silicide CMOS-compatible thin films
%A Schwinge, Caroline
%A Hoffmann, Raik
%A Hertel, Johannes
%A Wislicenus, Marcus
%A Gerlich, Lukas
%A Völklein, Friedemann
%A Gerlach, Gerald
%A Wagner-Reetz, Maik
%I AIP Publishing
%@ 0034-6748
%@ 1089-7623
%K Instrumentation
%D 2023
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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