%0 Generic
%T Aluminum mediated low temperature growth of crystalline silicon by plasma-enhanced chemical vapor and sputter deposition
%A Drüsedau, Tilo P.
%A Bläsing, Jürgen
%A Gnaser, Hubert
%I AIP Publishing
%@ 0003-6951
%@ 1077-3118
%K Physics and Astronomy (miscellaneous)
%D 1998
%C AIP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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