%0 Generic
%T Surface Gradient Integrated Profiler for X-ray and EUV Optics—Calibration of the rotational angle error of the rotary encoders
%A Higashi, Yasuo
%A Takaie, Yuichi
%A Endo, Katsuyoshi
%A Kume, Tatsuya
%A Enami, Kazuhiro
%A Yamauchi, Kazuto
%A Yamamura, Kazuya
%A Sano, Yasuhisa
%A Ueno, Kenji
%A Mori, Yuzo
%I AIP
%@ 0094-243X
%D 2007
%C AIP
%U http://slubdd.de/katalog?TN_libero_mab2
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