%0
Generic
%T
Metrology Of Silicide Contacts For Future CMOS
%A Zollner, Stefan
%A Gregory, Richard B.
%A Kottke, M. L.
%A Vartanian, Victor
%A Wang, Xiang-Dong
%A Theodore, David
%A Fejes, P. L.
%A Conner, J. R.
%A Raymond, Mark
%A Zhu, Xiaoyan
%A Denning, Dean
%A Bolton, Scott
%A Chang, Kyuhwan
%A Noble, Ross
%A Jahanbani, Mohamad
%A Rossow, Marc
%A Goedeke, Darren
%A Filipiak, Stan
%A Garcia, Ricardo
%A Jawarani, Dharmesh
%A Taylor, Bill
%A Nguyen, Bich-Yen
%A Crabtree, P. E.
%A Thean, Aaron
%A Seiler, David G.
%A Diebold, Alain C.
%A McDonald, Robert
%A Garner, C. Michael
%A Herr, Dan
%A Khosla, Rajinder P.
%A Secula, Erik M.
%I AIP
%@ 0094-243X
%D 2007
%C AIP
%U http://slubdd.de/katalog?TN_libero_mab2