%0 Generic
%T Fabrication and development of novel micromachined parylene-based electroactive membranes with embedded microfluidic architectures
%A Rebolledo Uscanga, Fernando Antonio
%A Pierce, Mark C
%A Zahn, Jeffrey D
%I IOP Publishing
%@ 0960-1317
%@ 1361-6439
%K Electrical and Electronic Engineering
%K Mechanical Engineering
%K Mechanics of Materials
%K Electronic, Optical and Magnetic Materials
%D 2023
%C IOP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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