%0 Generic
%T Plasma and electrical characteristics depending on an antenna position in an inductively coupled plasma with a passive resonant antenna
%A Kim, Ju Ho
%A Chung, Chin-Wook
%I IOP Publishing
%@ 0963-0252
%@ 1361-6595
%K Condensed Matter Physics
%D 2022
%C IOP Publishing
%U http://slubdd.de/katalog?TN_libero_mab2
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