%0 Generic
%T Structural changes in poly(methyl methacrylate) during deep‐etch X‐ray synchrotron radiation lithography. Part I: Degradation of the molar mass
%A Schmalz, Olaf
%A Hess, Michael
%A Kosfeld, Robert
%I Wiley
%@ 0003-3146
%@ 1522-9505
%K General Materials Science
%D 1996
%C Wiley
%U http://slubdd.de/katalog?TN_libero_mab2
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