%0 Generic
%T A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers
%A Engesser, Manuel
%A Franke, Axel R.
%A Maute, Matthias
%A Meisel, Daniel C.
%A Korvink, Jan G.
%I Springer Science and Business Media LLC
%@ 0946-7076
%@ 1432-1858
%K Electrical and Electronic Engineering
%K Hardware and Architecture
%K Condensed Matter Physics
%K Electronic, Optical and Magnetic Materials
%D 2010
%C Springer Science and Business Media LLC
%U http://slubdd.de/katalog?TN_libero_mab2
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