%0 Generic
%T In Situ Stress Measurements During GaN Growth on Ion-Implanted AlN/Si Substrates
%A Gagnon, Jarod C.
%A Tungare, Mihir
%A Weng, Xiaojun
%A Leathersich, Jeffrey M.
%A Shahedipour-Sandvik, Fatemeh
%A Redwing, Joan M.
%I Springer Science and Business Media LLC
%@ 1543-186X
%@ 0361-5235
%K Materials Chemistry
%K Electrical and Electronic Engineering
%K Condensed Matter Physics
%K Electronic, Optical and Magnetic Materials
%D 2012
%C Springer Science and Business Media LLC
%U http://slubdd.de/katalog?TN_libero_mab2
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