%0 Generic
%T Diffusion of phosphorus in TaSi2 thin films II: Lattice and short-circuit diffusion in TaSi2/SiO2
%A Pelleg, Joshua
%I Elsevier BV
%@ 0040-6090
%K Materials Chemistry
%K Metals and Alloys
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Electronic, Optical and Magnetic Materials
%D 1983
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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