%0 Generic
%T Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts
%A Jiguet, S.
%A Judelewicz, M.
%A Mischler, S.
%A Bertch, A.
%A Renaud, P.
%I Elsevier BV
%@ 0167-9317
%K Electrical and Electronic Engineering
%K Surfaces, Coatings and Films
%K Condensed Matter Physics
%K Atomic and Molecular Physics, and Optics
%K Electronic, Optical and Magnetic Materials
%D 2006
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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