%0 Generic
%T ULVAC research and development of Cat-CVD applications
%A Asari, Shin
%A Fujinaga, Tetsushi
%A Takagi, Makiko
%A Hashimoto, Masanori
%A Saito, Kazuya
%A Harada, Masamichi
%A Ishikawa, Michio
%I Elsevier BV
%@ 0040-6090
%K Materials Chemistry
%K Metals and Alloys
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Electronic, Optical and Magnetic Materials
%D 2008
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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