%0 Generic
%T Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen
%A Drüsedau, Tilo P
%A Bläsing, Jürgen
%I Elsevier BV
%@ 0040-6090
%D 2000
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
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