%0 Generic
%T Towards a multiscale approach to the growth of silicon films by chemical vapor deposition
%A Masi, Maurizio
%A Bertani, Valeria
%A Cavallotti, Carlo
%A Carrà, Sergio
%I Elsevier BV
%@ 0254-0584
%K Condensed Matter Physics
%K General Materials Science
%D 2000
%C Elsevier BV
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation