%0 Generic
%T (Best Paper Award) Aluminum Josephson Junction Formation on 200mm Wafers Using Different Oxidation Techniques
%A Lang, Simon
%A Schewski, Alexandra
%A Eisele, Ignaz
%A Kutter, Christoph
%A Lerch, Wilfried
%I The Electrochemical Society
%@ 2151-2043
%K General Medicine
%D 2023
%C The Electrochemical Society
%U http://slubdd.de/katalog?TN_libero_mab2
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