%0 Generic
%T Design and Test of a High-Sensitivity MEMS Capacitive Resonator for Photoacoustic Gas Detection
%A Yin, Yonggang
%A Ren, Danyang
%A Wang, Yuqi
%A Gao, Da
%A Shi, Junhui
%I Institute of Electrical and Electronics Engineers (IEEE)
%@ 1558-1748
%@ 2379-9153
%@ 1530-437X
%K Electrical and Electronic Engineering
%K Instrumentation
%D 2024
%C Institute of Electrical and Electronics Engineers (IEEE)
%U http://slubdd.de/katalog?TN_libero_mab2
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