%0 Generic
%T Optimization of the microcrystalline silicon deposition efficiency
%A Strahm, B.
%A Howling, A. A.
%A Sansonnens, L.
%A Hollenstein, Ch.
%I American Vacuum Society
%@ 0734-2101
%@ 1520-8559
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Condensed Matter Physics
%D 2007
%C American Vacuum Society
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation