%0 Generic
%T Nitrogen incorporation in sputter deposited molybdenum nitride thin films
%A Stöber, Laura
%A Konrath, Jens Peter
%A Haberl, Verena
%A Patocka, Florian
%A Schneider, Michael
%A Schmid, Ulrich
%I American Vacuum Society
%@ 0734-2101
%@ 1520-8559
%K Surfaces, Coatings and Films
%K Surfaces and Interfaces
%K Condensed Matter Physics
%D 2016
%C American Vacuum Society
%U http://slubdd.de/katalog?TN_libero_mab2
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