%0
Generic
%T
Application of computer tomography in microelectronic packaging
%A
Speck, Martina
%A
Wolter, Klaus-Jurgen
%A
Daniel, Dietmar
%A
Danczak, Marek
%I
SPIE
%@
0277-786X
%D
2004
%C
SPIE
%U
http://slubdd.de/katalog?TN_libero_mab2
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