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Generic
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Scatter analysis of optical components from 193 nm to 13.5 nm
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Schroeder, Sven
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Kamprath, Mathias
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Gliech, Stefan
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Duparre, Angela
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SPIE
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0277-786X
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2005
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SPIE
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http://slubdd.de/katalog?TN_libero_mab2
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