%0 Generic
%T Direct structuring of solids by EUV radiation from a table-top laser produced plasma source
%A Barkusky, Frank
%A Bayer, Armin
%A Peth, Christian
%A Mann, Klaus
%I SPIE
%@ 0277-786X
%D 2009
%C SPIE
%U http://slubdd.de/katalog?TN_libero_mab2
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