%0 Generic
%T Nanopositionierungen - die Basis der Nanometrologie (Nano Positioning Devices – The Basis of Nano-Metrology)
%A Wilkening, Günter
%I Walter de Gruyter GmbH
%@ 2196-7113
%@ 0171-8096
%K Electrical and Electronic Engineering
%K Instrumentation
%D 2000
%C Walter de Gruyter GmbH
%U http://slubdd.de/katalog?TN_libero_mab2
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