%0 Generic
%T Approaches to determining curvature of wafers by their topography
%A Dedkova, Anna A.
%A Florinsky, Igor V.
%A Djuzhev, Nikolai A.
%I Uspekhi Fizicheskikh Nauk (UFN) Journal
%@ 0042-1294
%@ 1996-6652
%K General Physics and Astronomy
%D 2022
%C Uspekhi Fizicheskikh Nauk (UFN) Journal
%U http://slubdd.de/katalog?TN_libero_mab2
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