%0
Generic
%T
Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser
%A
Wu, Yating
%A
Shang, Hongpeng
%A
Zheng, Xiaorui
%A
Chu, Tao
%I
MDPI AG
%@
2079-4991
%D
2023
%C
MDPI AG
%U
http://slubdd.de/katalog?TN_libero_mab2
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