%0 Generic
%T Silicon Surface Cleaning after Spacer Dry Etching
%A Shamiryan, Denis
%A Baklanov, Mikhail R.
%A Vanhaelemeersch, Serge
%I Trans Tech Publications, Ltd.
%@ 1662-9779
%K Condensed Matter Physics
%K General Materials Science
%K Atomic and Molecular Physics, and Optics
%D 2001
%C Trans Tech Publications, Ltd.
%U http://slubdd.de/katalog?TN_libero_mab2
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