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  1. Kundrata, Ivan; Mošková, Antónia; Moško, Martin; Mičušík, Matej; Dobročka, Edmund; Fröhlich, Karol

    Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

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    American Vacuum Society, 2021

    Published in: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films