author = { Osgood, R. M. AND Osgood, Richard M. AND Brueck, S. R. J. AND Schlossberg, H. R. },

title = { Laser diagnostics and photochemical processing for semiconductor devices symposium held November 1982 in Boston, Massachusetts, U.S.A. },

publisher = {North-Holland},

isbn = {0444007822},

keywords = { Lasers Industrial applications Congresses , Semiconductors Congresses , Semiconductor devices. Production. Use of lasers , Konferenzschrift , Konferenzschrift 1982 Boston, Mass. , Laserbearbeitung , Halbleiter , Lasertechnologie , Halbleitertechnologie },

year = {1983},

booktitle = {Materials Research Society symposia proceedings ; 17},

address = { New York [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }