%0 Book
%T Laser diagnostics and photochemical processing for semiconductor devices symposium held November 1982 in Boston, Massachusetts, U.S.A.
%A Osgood, R. M.
%A Osgood, Richard M.
%A Brueck, S. R. J.
%A Schlossberg, H. R.
%I North-Holland
%@ 0444007822
%K Lasers Industrial applications Congresses
%K Semiconductors Congresses
%K Semiconductor devices. Production. Use of lasers
%K Konferenzschrift
%K Konferenzschrift 1982 Boston, Mass.
%K Laserbearbeitung
%K Halbleiter
%K Lasertechnologie
%K Halbleitertechnologie
%D 1983
%C North-Holland
%C New York [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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