author = { International Symposium on Silicon-on-Insulator Technology and Devices 5 1992 Saint Louis, Mo AND Electrochemical Society Electronics Division AND Electrochemical Society Dielectrics and Insulation Division Bailey, Wayne E. },

title = { Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices [held May 17 - 22, 1992 in St. Louis, Missouri] },

publisher = {Electrochemical Society},

isbn = {1566770130},

keywords = { Silicon-on-insulator , Congresses , Semiconductors , Silicon-on-insulator technology , Konferenzschrift },

year = {1992},

abstract = {Spine title: Silicon-on-insulator technology and devices},

booktitle = {Proceedings / Electrochemical Society ; 92,13 ; Electronics and Dielectrics and Insulation Divisions},

address = { Pennington, N.J. },

url = { http://slubdd.de/katalog?TN_libero_mab2 }