%0 Book
%T Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices [held May 17 - 22, 1992 in St. Louis, Missouri]
%A International Symposium on Silicon-on-Insulator Technology and Devices 5 1992 Saint Louis, Mo
%A Electrochemical Society Electronics Division
%A Electrochemical Society Dielectrics and Insulation Division
%A Bailey, Wayne E.
%I Electrochemical Society
%@ 1566770130
%K Silicon-on-insulator
%K Congresses
%K Semiconductors
%K Silicon-on-insulator technology
%K Konferenzschrift
%D 1992
%X Spine title: Silicon-on-insulator technology and devices
%C Electrochemical Society
%C Pennington, N.J.
%U http://slubdd.de/katalog?TN_libero_mab2
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