TY - BOOK
AU - International Symposium on Silicon-on-Insulator Technology and Devices 5 1992 Saint Louis, Mo
AU - Electrochemical Society Electronics Division
AU - Electrochemical Society Dielectrics and Insulation Division
AU - Bailey, Wayne E.
TI - Proceedings of the Fifth International Symposium on Silicon-on-Insulator Technology and Devices [held May 17 - 22, 1992 in St. Louis, Missouri]
PB - Electrochemical Society
SN - 1566770130
KW - Silicon-on-insulator
KW - Congresses
KW - Semiconductors
KW - Silicon-on-insulator technology
KW - Konferenzschrift
PY - 1992
N2 - Spine title: Silicon-on-insulator technology and devices
BT - Proceedings / Electrochemical Society ; 92,13 ; Electronics and Dielectrics and Insulation Divisions
CY - Pennington, N.J.
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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