%0 Book
%T Low energy ion beam and plasma modification of materials symposium held April 30 - May 2, 1991, Anaheim, California, USA
%A Materials Research Society
%A Harper, James M.
%A Miyake, Kiyoshi
%A McNeill, John Robert
%A Gorbatkin, Steven M.
%I Materials Res. Soc.
%@ 1558991174
%K Materials Congresses
%K Ion bombardment Congresses
%K Electronics Materials Effect of radiation on Congresses
%K Materials
%K Congresses
%K Ion bombardment
%K Electronics
%K Effect of radiation on
%K Konferenzschrift 1991 Anaheim, Calif.
%K Konferenzschrift
%K Niedrige Energie
%K Ionenstrahl
%K Materialbearbeitung
%K Plasmastrahlbearbeitung
%D 1991
%X Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference
%C Materials Res. Soc.
%C Pittsburgh, Pa.
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation