author = { Huff, Howard R. },

title = { High dielectric constant materials VLSI MOSFET Applications; ... 31 tables },

publisher = {Springer},

isbn = {3540210814},

keywords = { Integrated circuits Very large scale integration , Semiconductors , Gate array circuits Materials Congresses , Dielectrics , Aufsatzsammlung , VLSI , MOS-FET , Gate Elektronik , Siliciumdioxid , Dielektrische Schicht , Siliciumoxinitride },

year = {2005},

abstract = {Literaturangaben},

booktitle = {Advanced microelectronics ; 16},

address = { Berlin },

url = { http://slubdd.de/katalog?TN_libero_mab2 }