TY - BOOK
AU - Huff, Howard R.
TI - High dielectric constant materials VLSI MOSFET Applications; ... 31 tables
PB - Springer
SN - 3540210814
KW - Integrated circuits Very large scale integration
KW - Semiconductors
KW - Gate array circuits Materials Congresses
KW - Dielectrics
KW - Aufsatzsammlung
KW - VLSI
KW - MOS-FET
KW - Gate Elektronik
KW - Siliciumdioxid
KW - Dielektrische Schicht
KW - Siliciumoxinitride
PY - 2005
N2 - Literaturangaben
BT - Advanced microelectronics ; 16
CY - Berlin
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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