%0 Book
%T Technology of integrated circuits
%A Widmann, Dietrich
%A Mader, Hermann
%A Friedrich, Hans
%I Springer
%@ 3540661999
%K Digital integrated circuits Design and construction
%K Metal oxide semiconductors, Complementary
%K VLSI
%K Halbleitertechnologie
%D 2000
%X Literaturverz. S. [323] - 328
%C Springer
%C Berlin
%U http://slubdd.de/katalog?TN_libero_mab2
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