author = { Electrochemical Society Dielectric Science and Technology Division AND Electrochemical Society Electronics Division AND Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 3 1994 San Francisco, Calif Kapoor, Vik J. AND Brown, William D. },

title = { Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide thin Insulating Films [held May 23 - 27, 1994 in San Francisco, California] },

publisher = {Electrochemical Society},

isbn = {1566770483},

keywords = { Thin film devices , Congresses , Silicon nitride , Silicon dioxide , Electric insulators and insulation , Thin films , Konferenzschrift , Siliciumnitrid , Siliciumdioxid , Dünne Schicht },

year = {1994},

abstract = {Includes bibliographies and indexes},

booktitle = {Proceedings / Electrochemical Society ; 94,16 ; Dielectric science and technology and electronics division},

address = { Pennington, NJ },

url = { http://slubdd.de/katalog?TN_libero_mab2 }