author = { Madou, Marc J. },

title = { Fundamentals of microfabrication the science of miniaturization },

edition = { 2. ed. } ,

publisher = {CRC Press},

isbn = {0849308267},

keywords = { Microelectronics , Integrated circuits Design and construction , Microelectromechanical systems Design and construction , Machining , Microelectronic packaging , Lasers Industrial applications , Lithografie Halbleitertechnologie , Mikrosystemtechnik , Mikromechanik , Entwurf , Konstruktion },

year = {2002},

abstract = {3. Aufl. u.d.T.: Madou, Marc J.: Fundamentals of microfabrication and nanotechnology. - 3. Aufl. in 3 Bd},

abstract = {Literaturangaben},

address = { Boca Raton, Fla. [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }