author = { Kazinczi, Róbert },

title = { Reliability of micromechanical thin-film-resonators },

publisher = {Eburon},

isbn = {9051668910},

keywords = { Hochschulschrift , Dünnschichttechnik , Resonator , Mikromechanik , Zuverlässigkeit },

year = {2002},

abstract = {Zsfassung in niederländ. Sprache},

address = { Delft },

url = { http://slubdd.de/katalog?TN_libero_mab2 }