%0 Book
%T Evolution of thin film morphology modeling and simulations
%A Pelliccione, Matthew
%A Lu, Toh-Ming
%I Springer
%@ 9780387751085
%@ 0387751084
%K Thin film devices
%K Thin films Microstructure
%K Thin films Mathematical models
%K Chemical vapor deposition
%K Morphologie
%K Dünnschichttechnik
%D 2008
%C Springer
%C Berlin
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation