@book
{TN_libero_mab2,
author = {
Jones, Anthony C.
AND
Hitchman, Michael L.
},
title = {
Chemical vapour deposition
precursors, processes and applications
},
publisher = {RSC Publishing},
publisher = {},
isbn = {0854044655},
isbn = {9780854044658},
keywords = {
Chemical vapor deposition
,
Aufsatzsammlung
,
CVD-Verfahren
},
year = {[2009]},
year = {, © 2009},
abstract = {Literaturangaben},
address = {
Cambridge
,
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}