author = { Shacham-Diamand, Yosi },

title = { Advanced nanoscale ULSI interconnects fundamentals and applications },

publisher = {Springer},

isbn = {9780387958675},

keywords = { Integrated circuits Ultra large scale integration , Nanoelectromechanical systems , Nanotechnologie , ULSI },

year = {2009},

abstract = {Formerly CIP Uk. - Includes bibliographical references and index},

abstract = {Literaturangaben},

address = { New York, NY },

url = { http://slubdd.de/katalog?TN_libero_mab2 }