author = { Baklanov, Mikhail R. AND Ho, Paul S. AND Zschech, Ehrenfried AND Baklanov, Mikhail },

title = { Advanced interconnects for ULSI technology },

edition = { 1. publ. } ,

publisher = {Wiley},

isbn = {9780470662540},

isbn = {0470662549},

keywords = { Interconnects (Integrated circuit technology) , Integrated circuits Ultra large scale integration , Integrated circuits , Ultra large scale integration , Integrierte Schaltung , ULSI },

year = {2012},

abstract = {Includes bibliographical references and index},

address = { Chichester },

url = { http://slubdd.de/katalog?TN_libero_mab2 }