%0 Book
%T Advanced interconnects for ULSI technology
%A Baklanov, Mikhail R.
%A Ho, Paul S.
%A Zschech, Ehrenfried
%A Baklanov, Mikhail
%7 1. publ.
%I Wiley
%@ 9780470662540
%@ 0470662549
%K Interconnects (Integrated circuit technology)
%K Integrated circuits Ultra large scale integration
%K Integrated circuits
%K Ultra large scale integration
%K Integrierte Schaltung
%K ULSI
%D 2012
%X Includes bibliographical references and index
%C Wiley
%C Chichester
%U http://slubdd.de/katalog?TN_libero_mab2
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