author = { Huff, H.R AND Gilmer, D.C },

title = { High Dielectric Constant Materials VLSI MOSFET Applications },

publisher = {Springer Berlin Heidelberg},

isbn = {9783540264620},

keywords = { Condensed matter , Optical materials , Surfaces (Physics) , Chemistry , Aufsatzsammlung , VLSI , MOS-FET , Gate Elektronik , Siliciumdioxid , Dielektrische Schicht , Siliciumoxinitride },

year = {2005},

booktitle = {Springer Series in Advanced Microelectronics ; 16},

booktitle = {SpringerLink ; Bücher},

address = { Berlin, Heidelberg },

url = { http://slubdd.de/katalog?TN_libero_mab2 }