TY - GEN
AU - Liu, Chun-Li
AU - Jiang, Z. X.
AU - Hegde, R. I.
AU - Sieloff, D. D.
AU - Rai, R. S.
AU - Gilmer, D. C.
AU - Hobbs, C. C.
AU - Tobin, P. J.
AU - Lu, Shifeng
TI - Theoretical and experimental investigation of boron diffusion in polycrystalline HfO2 films
PB - AIP Publishing
SN - 0003-6951
SN - 1077-3118
KW - Physics and Astronomy (miscellaneous)
PY - 2002
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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